Contracting and expanding piezo actuators have small displacementstypically up to 20 micronsbut can generate hundreds of newtons force. Piezo stack actuators use the variation of the stack length under electrical activation. Piezo stack actuators are equipped with a highly reliable, multilayer, lowvoltage, piezoelectric transducer stack. The piezoelectric stack is used to drive the micro. Numerical modeling of electricalmechanicalacoustical. A stack capable of 200 microns of motion which appears to be the upper limit among commercially available devices will typically be about 200 mm. Design and experimental research of a rotary microactuator. Actuators produce movements like motors do by producing a linear displacement under an electric field, which allows the displacement also to apply a force. Pdf brochure piezo stack actuator specs, drawings, part numbers. Custom actuator designs with larger travel ranges, higher forces or faster response, as well as nonmagnetic versions are feasible. A n illustration of displacement of a piezoceramic material versus applied voltage for a piezo actuator stack, is shown in next figure. Depending on the size of the ceramic stacks, these stack type actuators can move masses in the kns. Piezoelectric translators transducers are precision ceramic actuators which convert electrical energy directly into linear motion with high speed, force and virtually unlimited resolution. The flexure mount acts as a lever arm that amplifies the free stroke displacement of the standalone discrete stack.
Solidstate actuator, using the inverse piezo electrical effect synonyms. The piezo stack actuators have been exploited in a number of useful applications including nanopositioning, dynamic scanning system, metrology, aerospace technology and so on. Piezoelectric actuators can also be made with nonmagnetic materials, which allows their use in mri machine. Therefore, this paper presents a straightforward method to measure piezoelectric stack actuator equiv. Based on their large size, they are ideally suited for high loads. The piezoelectric stack actuator is one of the most established actuator device for active systems. Mathematical modeling of a vstack piezoelectric aileron.
Static and dynamic precision positioning laser tuning microdispensing metrology. By combining many chips, a stack is able to achieve a free stroke displacement that is significantly larger than that of its single chip counterpart while mainta. Although the experimental study of the static and dynamic behavior of piezoelectric stack actuators has received some attention i. The bender actuator also is smaller than the stack actuator but generates significantly less force. The piezoelectric stack used in this study was a commercially available stack pst and comparison of piezoelectric, magnetostrictive, and electrostrictive hybrid hydraulic actuators. Pdf multilayer piezoelectric stack actuator characterization. Physik instrumente usa precision motion control 245,945 views.
Preloading a piezo stack inside a case by means of special springs allows the actuator to handle higher tensile forces. Electrical and force characteristics of piezoelectric. Download the newest pdf files or request printed catalogs and brochures by mail. Piezo stack actuator,precision piezo actuator, pzt stack actuator, piezo motion, piezo actuation,pzt actuation, piezo mechanics, piezo nanopositioning, piezo ceramic, piezo transducer, shear actuator, piezo.
Subnanometer runout introduction advantages of piezoelectric positioning systems applications for piezo actuators glossary units and. Introduction the piezoelectric actuator drive pad shown in fig. Another limitation is a significant amount of hysteresis, or variation of travel vs. A nonlinear lumpedparameter model of a piezoelectric stack actuator has been developed to describe actuator behavior for purposes of control system analysis and design, and, in particular, for microrobotic applications requiring accurate position andor force control. The benchmark solution for piezoelectric actuators is the cofired multilayer actuator cma technology. The fe formulation provides a model of stack actuators by which the dynamic behaviour is calculated. Piezo products piezoelectric materials apc international. Theory and applications of piezo actuators and pzt. However, the hysteresis nonlinear behavior limits the dynamic modeling and. The piezoelectric actuator is a device that features high displacement accuracy, high response speed and high force generation. The length of the piezoelectric stack is directly controlled by applying an electrical voltage. Piezoelectric pz actuator is widely recognized for its high precision and displacement accuracy even at nanometer ranges. Pdf modeling piezoelectric stack actuators for control. High reliability, large specific displacement and high forces.
The piezoelectric effect for pi provides a large variety of piezo actuator and piezo motor drive the operating limits of a linear piezo amplifier depend on the amplifier power, the amplifier. The most commonly used technology is the amplified piezoelectric actuator. In order to generate an electric field, the circular area on the surface. The software reads the desired control value from the file, and has two measurement channels and. Piezo actuator movements will be on the order of a hundred micro meters supporting a load of 7 kncm2. Electrical operation of piezo actuators pi ceramic. Low voltage actuators in casings with front mount threading 12 1. Piezoelectric stack actuator parameter extraction with. Aerotech amplifiers take full advantage of the semibipolar operation of piezoelectric stack actuators.
They have high blocking forces and can move large masses. Tube actuators are monolithic devices that contract laterally and longitudinally when a voltage is applied between the inner and outer electrodes. Both piezoelectric actuators are actuated such that, when one piezoelectric actuator is extending, the other piezoelectric actuator is contracting then one speak about pushpull or antagonistic system. Pica power highforce highload packaged preloaded piezo stack linear actuators. The multilayer piezo actuators are offered as piezo actuator plates and piezo actuator rings single elements or actuator stacks and as high temperature stacks and damage tolerant stacks. Pica piezoelectric stack actuators physik instrumente. Piezo stack actuator, stack piezo actuator manufacturer. Thanks to these characteristics, the piezo actuators are suitable for many demanding nanopositioning. Dec 23, 2015 these actuators use the transverse piezoelectric effect and typically produce motion in just one direction. This thesis presents the design of a piezoelectric ceramic stack actuator for use with needlefree jet injection nfji devices. A lumpedparameter model of a piezoelectric stack actuator has been developed to describe actuator behavior for purposes of control system analysis and design. Other options for these actuators can be casings specially designed to manage the heat generated during operation, or include the possibility of position sensing for the piezoelectric stack actuator.
They are internally preloaded by a mechanical spring and feature high resonant frequencies, making them ideal for high load, dynamic nanopositioning applications. A special epoxy sealing guarantees the most flexible, longest lifetime protection available on the market. An example of displacement versus applied voltage for a piezo actuator stack in this region of the curve is shown in figure 2. Feb 25, 2015 how does the piezoelectric effect work for motion. Modeling piezoelectric stack actuators for control of. Preisach model of hysteresis for the piezoelectric actuator drive. However, offresonant piezoelectric actuator tends to exhibit important nonlinearities hysteresis. The piezo actuators can acheive extremely highresolution nanopositioning in the nm and subnm range. They are internally preloaded by a mechanical spring and feature high resonant frequencies, making them ideal for high load, dynamic applications. At operating frequencies well below the resonant frequency, a piezo actuator behaves like a capacitor. A piezo actuator has no moving parts like gears or bearings. Piezo stack actuator steminc piezoceramic discs, plates.
Andersen department of electrical engineering, technical university of denmark denmark email. The p212 and p216 series are highresolution linear piezo actuators translators for static and dynamic applications. Selfheat generation in piezoelectric stack actuators used. The stroke versus applied voltage relationship for piezo electric actuators is not perfectly linear as predicted.
Hermetically sealed actuators with inert gas filling can be used in harsh environments. Pica piezoelectric linear actuators in stacked design are very reliable and feature a large specific displacement. Stacked piezo linear actuators with operating voltages to v. Piezo ceramic actuators, positioners and transducers. To achive maximum displacement, the drive should be capable of developing the full rated actuator voltage. A stack type actuator or piezo actuator from piezosystem jena is based on multilayer ceramics. Control of an experimental piezoelectric actuators system. Piezo actuator manufacturer and supplier piezo direct. If displacement is prevented, a useable force blocking force will develop. Resonant frequency and hysteresis of a stack actuator made. Nanopositioning piezo stack actuators newport corporation. Pica thru feature an inner hole, for applying a pretension or as clear aperture in optical applications. With position control the hysteresis will effectively be reduced dotted line.
It takes the form of a thin ceramic disc which is bonded to a metal substrate. Keywords motor, actuator, piezoelectric, stack, multilayer, hysteresis, model, preisach i. Behavioral implications of piezoelectric stack actuators for. The idea of piezo stack actuators is as simple as it is effective. This technique has been proven in the field for many years by our extensive experience. Patented picma stack multilayer piezo actuators with. Pdf unified minimalistic modeling of piezoelectric stack. Piezoelectric actuators with technical data for various transducers types bender actuator disc translator stack transducer a disc transducer is also a very simple piezo element. The output voltage range is the first consideration to be taken into account when selecting a drive for piezoelectric actuators. Overview npa piezo stack actuators are equipped with a highly reliable, multilayer, lowvoltage, piezoelectric transducer stack. Although the stack design has made the piezo actuator practical, the displacement of the piezo stack is still very limited for some applications 14. The tiny motions of each layer contribute to the overall displacement. The pahl series of actuators consists of high number of piezoelectrical plates. A stack actuator is comprised of a stack of multiple slabs of smaller pieces of piezoelectric material.
All piezo actuators can be custom designed to match specific requirements. Development of a new high specific power piezoelectric actuator a thesis in mechanical engineering by jacob joseph loverich. A hybrid actuator consisting of a dc motor plus lead screw in series with a piezoelectric stack. This is in contrast to other kinds of moving profiles like shear elements or bending elements bimorphs. Noliac piezo actuators are made as both monolayer and multilayer products. Current measurement in control and monitoring of piezoelectric. Vacuum and clean room compatible piezoelectric actuators neither. The nominal quasistatic behavior of a piezoelectric stack actuator is a steadystate output displacement that is. The hysteresis of the piezo stack actuator is indicated. Thorlabs discrete piezoelectric stacks consist of multiple piezoelectric chips stacked facetoface and bonded via epoxy and glass beads. Piezoelectric actuators are popularly applied as actuators in high precision systems due to their small displacement resolution, fast response and simple construction. Comparison of piezoelectric, magnetostrictive, and. We can determine the amount of movement that a stack actuator can produce by calculating the amount of voltage applied times the d33, also known as the piezoelectric charge. Pdf dynamic analytical solution of a piezoelectric stack.
But also tubes, benders, shear actuators and flexible transducers, are. Design and fabrication of a piezoelectric stack actuator. Providing subnanometer resolution and submillisecond re s ponse, they are ideally suited to highlevel dynamic applications. T hese designs enable the embedding of developed solidstate motors actuators in any structure with the on ly. Types and applications piezo actuators apc international. Piezoelektrische aktoren piezoelectric actuators pi ceramic. The very high stiffness of the actuators employed make this type of motor suited for openloop control, but the inherent hysteresis exhibited by piezoelectric ceramics causes losses. Uhvcompatible to 109 hpa, no outgassing, high bakeout temperature.
Piezoelectric tweezertype endeffector with force smartech. In this paper a finite element fe fomiulation for a piezoelectric rod is derived. The actuator displacement is proportional to the stored electrical charge, as a first order estimate. When a contracting actuator is mounted to a base or substrate, a bending actuator is created. This paper presents the dynamic analytical solution of a piezoelectric stack utilized in an actuator and a generator based on the linear piezo elasticity theory. Compared to existing piezoelectric actuator technology, significant features of the feedscrew concept include reversible and robust actuation capability, simple power electronics, and a rigid poweroff selflocking state. Therefore, in this section, a multilayer piezoelectric actuator is modeled both analytically. The stiffness of the stack dictated by youngs modulus of elasticity of the pure. Cryogenic piezoelectric actuator xiaoning jiang a, william b. Popular monolithic stack actuators are available in voltage ratings from 60v to 200v.
The cofired stack shown in figure7 is a practical way to assemble and wire a large number of piezo layers into one monolithic structure. It has mainly been applied in support of industrial machinery that requires precise position control. Piezoelectric stack or multilayer actuators are manufactured by stacking up piezoelectric disks or plates, the axis of the stack being the axis of linear motion that occurs when a voltage is applied. The stiffness of the stack dictated by youngs modulus of elasticity of the pure active material and the insulating material as well as the crosssectional area and length of the stack determines the amount of energy transferred by the stack to the fluid in the pumping chamber through an impedance. Electromechanical modelling of piezoelectric actuators. The capacitance of the actuator depends on the area and thickness of the ceramic as well as the material properties. Types and applications a piezoelectric actuator converts an electrical signal into a precisely controlled physical displacement stroke. Theory and applications of piezo actuators and pzt nanopositioning systems design of pzt stack actuator design of simple lever amplifier data showing impact of active trajectory control on guiding precision. A nonlinear lumpedparameter model of a piezoelectric stack actuator has been developed to describe actuator behavior for purposes of control system analysis and design, and, in particular, for.
The actuator is compact in structure, and the key component is the shearing piezoelectric stack. Pi has conducted endurance tests on piezo actuators in which no measurable change in performance was observed after several billion cycles. Actuators using piezoelectric stacks and displacement. A minimalistic model is proposed in the present work, for pz stack.
Piezoelectric actuators developed by cedrat technologies. Piezoceramic displacement piezotechnics piezo stack. Piezoelectric actuator an overview sciencedirect topics. They provide submillisecond response and subnanometer resolution. The piezoelectric actuator drive pad is a type of rotary motor that transforms the linear motion of piezoelectric stack actuators into a precise rotational motion. Smart actuators, including piezoelectric actuators, shapememoryalloy actuators, and multilayeredtype actuators.
Stack actuators can generate linear movement reaching displacements of 250 micrometers and forces up to 10 kn with very high speed. In formulating this model, the authors propose a generalized maxwell resistive capacitor as a lumpedparameter causal. Classd amplifier design and performance for driving a piezo. February 2002 discloses a different design for the piezoelectric actuator that provides larger strokes for the valve 15 microns to allow use with fluids containing suspended particles whose diameter is as large as 10 microns. Noliac piezo actuators for your application noliac. Its displacement is based on solid state dynamics and shows no wear and tear. Controlling helicopter rotor blades using active flaps has been investigated for some time without being put into production. While nfji devices have been in use for over 60 years only recently have they been electronically actuated which allows for precise control of jet velocity, penetration depth, and injection volume. Pi provides many different types of piezo actuators and motors.
Piezo stack actuator,precision piezo actuator, pzt stack actuator,piezo motion, piezo actuation,pzt actuation,piezo mechanics, piezo nanopositioning, piezo ceramic, piezo transducer, shear actuator, piezo bender. Stack motion on the order of microns to tens of microns, and force from hundreds to thousands of newtons is typical. Piezoelectric devices applications of piezoelectric actuator. Piezo actuators piezotechnics piezo stack actuators. Piezoelectric stack actuator life test request pdf. Fuzzy modeling of a piezoelectric actuator request pdf. For this purpose, multilayer piezoelectric stacks are being considered as actuators for driving these precision mechanisms. The piezoelectric actuators developed by cedrat technologies have the following outstanding characteristics. Electrode and ceramics raw materials are formed to a block and sintered at high temperatures. In order to use it in the structure of an acoustic source, its parameters have to be characterized.
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